Focused ion beam milling of ridge waveguides of edge-emitting semiconductor lasers

Formation of coupled-cavities in quantum cascade lasers using focused ion beam milling

Realization of on-chip lasers in crystalline double tungstate waveguides using focused-ion-beam nanostructuring

We report our recent work on obtaining on-chip lasers in crystalline double tungstate waveguides using focused-ion-beam (FIB) nanostructuring. Photonic cavity structures were defined by forming deeply etched Bragg gratings in KGdxLu1-x(WO4)2:Yb 3+ using FIB milling. The FIB milling procedure was optimized and gratings more than 4 μm in depth with an improved total sidewall angle of about 5 wer...

Sub-micron grating fabrication on hafnium oxide thin-film waveguides with focused ion-beam milling.

Uniform period sub-micron gratings have been fabricated using focused ion beam milling on hafnium oxide waveguides. Atomic force microscopy indicates that the gratings have smooth and uniform profiles. At the period of 330 nm, the largest peak-to-peak height that was achieved was 85 nm. Scattering at the grating imperfections was found to be at least two orders of magnitude weaker than the inte...

Mathematical Models of Heat Flow in Edge-Emitting Semiconductor Lasers

Edge-emitting lasers started the era of semiconductor lasers and have existed up to nowadays, appearing as devices fabricated out of various materials, formed sometimes in very tricky ways to enhance light generation. However, in all cases radiative processes are accompanied by undesired heat-generating processes, like non-radiative recombination, Auger recombination, Joule effect or surface re...

Focused ion beam milling of microchannels in lithium niobate.

We present experimental and simulation results for focused ion beam (FIB) milling of microchannels in lithium niobate in this paper. We investigate two different cuts of lithium niobate, Y- and Z-cuts, and observe that the experimental material removal rate in the FIB for both Y-cut and Z-cut samples was 0.3 μm(3)/nC, roughly two times greater than the material removal rate previously reported ...